piezoelectric actuator working principle

(f) Motion tracking for z2 axis and parasitic motion for z1 axis. The summary and classification of the actuation modes used in the multi-DOF piezoelectric motion stages are presented and the output performances of the stages are compared, and the state of the arts of the stage are discussed and summarized. The natural frequency for each direction is around 3.7kHz due to the identical chain. two double parallel four-bar linkage mechanisms and two right circular flexure hinges. We can increase the mechanical stiffness of the PE part. (f) Harmonic tracking performance for y and z axes during cutting [14]. A novel three-degree-of-freedom piezoelectric actuator, which is driven by two pairs of piezo-stack actuator with spatial compliant mechanisms designed to guide the motion and preload the piezo-stack actuators, is herein proposed. Its based on principles of collaboration, unobstructed discovery, and, most importantly, scientific progression. Figure 5 shows the deflected bristle in LuGre friction model. Inchworm actuators produce a large output force but their structure and control system are complicated [1417]. In general, there are three commonly used piezoelectric actuator configurations, i.e. 25, no. The results of the step responses along z1 axis and z2 axis are shown in Figure 5(a). (e) Actual tool locus. Accordingly, great efforts have been made to improve the performances of piezoelectric actuators, and significant progress has been achieved. It can be found from Figure 6(c) that the resolution in Z direction and Y direction are all within 8nm. For one compliant chain, the double parallelogram mechanism with eight right circular flexure hinges and a spatial transition mechanism with four sets of parallelogram limbs were adopted. 1 The moving stages in a motion Modeling of Piezoceramic Actuators for Control, 6. Multi-degree of freedom piezoelectric actuators are strongly needed for industrial applications, especially when manipulating a large and heavy mirror or lens in an optical system. The natural frequencies in X and Y directions (i.e. In this work, a flexure-based EVC vibrator with vertical piezoelectric actuator configuration was proposed. Home > (d) Simulated tool locus. (d) Frequency response. The content covers the working principle of piezoelectric tool actuator, compliant mechanism design, static modeling, kinematic and dynamic modeling, structure optimization and offline testing. The influences of system noises were eliminated by a low pass filter, and a velocity feedforward compensator was utilized to enhance the response speed. 264, pp. There are no steady errors and overshoots. (d) Deformation schematic of flexure-based mechanism. (e) Experimental results of kinematic performance. WebAmong them, the stick-slip piezoelectric actuators are favored by researchers due to their simple structure [19,20], low manufacturing and assembly requirements [21,22], easy control [23,24], and high positioning resolution [25,26]. The steel was adopted for connecting shaft manufacturing to increase connection stiffness. Second, the velocity, which is presented as the slope of the line, increases with frequency. Design, Characterisation and Prospect of Piezoelectric Microfluidic Technology, 8. The angular velocity maintains a good linear relationship with the applied voltage at most frequencies. The first two natural frequencies of the pseudo-decouple compliant mechanism are 863Hz and 1893Hz, respectively. These two figures demonstrate the double-frequency EVC tracking ability. The maximum displacements along x1 and x2 axes are not the same which are 22m and 24m, respectively, due to the manufacturing error. Brief introduction to this section that descibes Open Access especially from an IntechOpen perspective, Want to get in touch? Figure 11 shows the experimental system adopted to test the characteristics of the designed actuator. The experimental results are shown in Figure 13. A smaller step angle means that the actuator can reach higher resolution. Video: V8 piezo motor working principle . The piezoelectric actuator works unstably in the case that U < 220 V or U > 120 V. In the case that the input voltage is smaller than 20 V, the proposed piezoelectric actuator is not able to move stably, and the minimum stepping displacement is L 90100, 2013. Simulation results under sawtooth signal of 500Hz 90V. (a) Driving voltage. (b) Working principle. When the frequency is increased beyond the bandwidth, the displacement output of the driving mechanism output would fall sharply, resulting in a decreased step angle. According to their working principles, piezoelectric actuators can be divided into direct-drive actuators, ultrasonic actuators, inchworm actuators, and inertial actuators. Section 2 clarifies the configuration and working principle of the actuator. 3, pp. The measured tool locus are in accordance with the simulated locus shown in Figure 12(d). It can be seen that if the fixed condition was improved, the second natural frequency will become the first natural frequency, which is helpful to achieve a large working bandwidth. As shown in Figure 7(a), two perpendicular leaf-spring flexure hinges were applied to decouple the 2D motion. Fan, T.-F. Lu, Y. Cheng, and Y. Peng, , Improving load capacity of stick-slip actuators in both driving directions via a shared driving foot, A simple compliance modeling method for flexure hinges, Design, analysis and experimental performance of a stepping type piezoelectric linear actuator based on compliant foot driving, Ultracompact planar positioner driven by unbalanced frictional forces, Design, analysis and experimental performance of a piezoelectric rotary actuator based on compliant foot driving, J. Li, H. Zhao, X. Qu, H. Qu, X. Zhou, Z. There are almost no overshoot and steady errors by utilizing a typical PID controller. J. Guo, S. K. Chee, T. Yano, and T. Higuchi, Micro-vibration stage using piezo actuators, Sensors and Actuators A: Physical, vol. The resolution of the z1 axis and z2 axis are approximately 9nm and 10nm. As shown in Figure 3(b) are the results of the step responses along z1 axis and z2 axis. 88, Taylor & Francis, Abingdon, UK, 2015. (b) Mechanical structure of the compliant spatial vibrator. A novel three-degree-of-freedom piezoelectric actuator, which is driven by two pairs of piezo-stack actuator with spatial compliant mechanisms designed to guide the motion and preload the piezo-stack actuators, is herein proposed. According to the optimization results, a prototype was fabricated with the 7075 T6 aluminum. WebPiezoelectric actuators are transducers that convert electrical energy into a mechanical displacement or stress based on a piezoelectric effect, or vice versa. Figure 15 presents the relationship between the step angle and applied voltage. An, J. W. Li, and W. J. Zhang, , Piezoelectric frictioninertia actuatorA critical review and future perspective, K. Chen, J. Wen, G. Cheng, J. Ma, and P. Zeng, , An asymmetrical inertial piezoelectric rotary actuator with the bias unit, J. Li, X. Zhou, H. Zhao, M. Shao, N. Li, S. Zhang, and Y. Working principle The proposed actuator generates symmetric driving force with two piezoelectric bimorphs but asymmetric friction controlled by the electromagnet. Configuration of the proposed piezoelectric rotary actuator. WebThe piezoelectric effect is a reversible process: materials exhibiting the piezoelectric effectalso exhibit the reverse piezoelectric effect, the internal generation of a mechanical Brief introduction to this section that descibes Open Access especially from an IntechOpen perspective, Want to get in touch? (d) Motion tracking for Z-axis and parasitic motion for Y-axis. The resolution of z1 and z2 axes are approximately 15nm and 30nm. Basic knowlede of Piezoelectric Actuators. 4, pp. Obviously, the non-resonant type EVC vibrator has more advantages than the resonant type EVC vibrator. The step angle decreases as the applied voltage decreases or as the frequency of the applied voltage increases. WebA piezoelectric actuator converts an electrical signal into a precisely controlled physical displacement (stroke). A harmonic signal with frequency of 1Hz and amplitude voltage of 5V was applied to each actuator to assess the motion stroke and the parasitic motion. 119127, 2013. However, these non-resonant EVC vibrators have limited modulation ability and severe crosstalk. UNITED KINGDOM, Introduction to the different types of EVC, Development of the non-resonant type EVC vibrator. The actuator has been proposed, fabricated, and tested. Applying a high voltage current into this system causes the Electromagnetic noiseless. First, we see that the displacement has a good linear relationship with time and the displacement has no visible backwards motion. (d) Results of the frequency responses. In recent years, the flexure-based non-resonant EVC vibrator has been developing rapidly. Y. Zhang and T.-F. Lu, On an equivalent model of multi-layer piezoelectric actuators for facilitating finite element simulations, Microsystem Technologies, vol. A small beam was placed on the cover of the actuator to assist the laser sensor in measuring the rotary motion. 3542, 2017. The structure and working principle of the proposed actuator are illustrated and its View on PubMed Fan, and H. Fu, , Development of a compact 2-DOF precision piezoelectric positioning platform based on inchworm principle, This option allows users to search by Publication, Volume and Page. This experiment simulates the situation that one piezoelectric stack is faulty and does not provide the expected driving motion. The preload springs produce sufficient pressure between the friction block and outer ring of the bearing. Various non-resonant piezoelectric actuators have been emerged in recent decades and they have been applied successfully in many industrial fields, such as medical apparatuses, optical instruments and semiconductor technologies. Illustration of 3D model, prototype and testing results. Figure 12 presents displacement data obtained directly from the laser sensor when the actuator installed with only one piezoelectric stack was driven by a sawtooth wave signal having a voltage of 93V and symmetry of 100% and different frequencies. The complex features require a cutting tool no longer confined to the traditional motion guide. In the stick phase, the voltage rises slowly, the rotor part and PE part move together, and the two drawn displacement lines overlap each other. 5762, Harbin, China, August 2007. An experimental system is built to evaluate the performance of the actuator at different frequencies, voltages, and numbers of driving piezoelectric stacks. Electromagnetic actuators are reliable and robust, simple to manufacture and mass produce, and easily integrate in mechatronic systems. There are four motion guidance components in the mechanical structure, i.e. Over the years, piezoelectric actuators have, This paper presents the design analysis fabrication and testing of a high-bandwidth piezo-driven parallel kinematic nanopositioning XY stage. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. 269276, 2013. | What is it used for? For any assistance during ordering process, contact us at orders@intechopen.com, Edited by In order to avoid the installation error, the base part and the hinge part were designed to be an integral flexure hinge structure [10]. With the rapid growth of science and technology, precision components are increasingly in demand in various fields such as aerospace, biomedical engineering, optics, surface engineering and energy. In this system, a metal plate and an actuator device This chapter aims to make an introduction for piezoelectric tool actuator used in elliptical vibration cutting, which can be offering tertiary cutting operations with quick response and flexible modulated ability. Figure 12(f) shows the tracking performance in x-direction. UNITED KINGDOM, Principles, Design, Experiments and Applications, Microelectromechanical Systems and Devices. The length of the groove is slightly shorter than the original length of the piezoelectric stack by 510m, so the piezoelectric stack can be preloaded. We draw the following conclusions from the simulation results shown in Figures 79. In this work, a flexure-based EVC vibrator actuated by two parallel and one perpendicular piezoelectric actuator was proposed [15]. The prototype was manufactured and the experimental tests were carried out to evaluate the performance. Objective: L(t1, t2, r)30m, f(t1, t2, r)>3000Hz. S. Wang, W. Rong, L. Wang, Z. Pei, and L. Sun, Design, analysis and experimental performance of a novel stick-slip type piezoelectric rotary actuator based on variable force couple driving, Smart Materials and Structures, vol. Features from utilizing solid transformation by driving voltage. An increase in the driving frequency reduces the total time of a single cycle waveform. Piezoelectricity - How does it work? This is because a higher applied voltage results in larger displacement in the stick stage and thus higher angular velocity. Figure 8(e) shows the experimental results of kinematic performance. When the driving voltage is applied to the piezoelectric stack, a driving force Fp is generated, and a friction force Ff is generated on the contacting surface of the PE part and rotor part. To date our community has made over 100 million downloads. The direct piezo effect, employed for The optimization problem was stated first. Most piezoelectric actuators are classified into two types. Z. M. Zhang, Q. Simulation results of the PAs angular velocity under different frequencies and amplitudes of sawtooth waveform. This paper mainly discusses the latter. Simulation results of rotation displacement of the PA under 500Hz sawtooth waveform at different amplitudes. In general, the mechanical structure decoupling design is usually adopted. (b) The prototype [9]. Additionally, the dynamics analysis was also conducted based on the Lagrange equation and FEA method. And this chapter reviews some typical examples according to the different types of EVC, including the mechanical structure, working principle of piezoelectric actuator, the static modeling, kinematic and dynamic modeling, structure optimization and testing. The first natural frequency of the mechanism is 2734Hz, and the second natural frequency is 6254Hz. The structure of the rotary actuator is designed for an optical path adjustment system as discussed in Section 1. In the case that a displacement or a force is applied on the tip of a beam with asymmetrical structure, the beam moves in several directions. The working frequency is the resonance frequency. Additionally, the developed EVC vibrator has a good tracking performance and very low crosstalk between the motion axes. In ultraprecision machining, especially the structured surface with micro-nano features, it requires exceptionally fine and repeatable motions, which makes the piezoelectric actuator a popular candidate for EVAM. The advantages of EVC were described in detail. The actuator rotates well at a lower speed. They are generally classified into three categories according to their different working principles: the direct drive type, the inertial drive type and the inchworm type, respectively. Compared with the resonant vibration, the non-resonant type EVC vibrator provides much higher flexibility due to the elastic deformation of compliant mechanism. Although the piezo motor only consumes 2.4% of the total gathered power, the system can convert 83.4% of it into usable electrical power. The power amplifier amplified the signal from the waveform generator. For resonant type EVC vibrator, usually consists of an ultrasonic generator, a transducer and an ultrasonic vibration horn. A comprehensive review of recent studies on the non-resonant piezoelectric actuators is provided. Then the analytical stiffness modeling was carried out. To sign up for alerts, please log in first. Fig. 394399, 2011. In this work, following a comparison of the features of different types of piezoelectric actuator, we developed a novel stick-slip piezoelectric actuator for optical application. 40, pp. The upper component and bottom component are connected in parallel with the end-effector beam. Publishing on IntechOpen allows authors to earn citations and find new collaborators, meaning more people see your work not only from your own field of study, but from other related fields too. The fixture is used for attaching the whole mechanism onto the spindle of the machine tool through a vacuum chuck. Abstract. This design is not unique, of course. The coupling motion in Y direction is 0.06m, which is 0.6% of the Y-direction testing stroke. The dynamic model of the actuator is established, and simulations are performed to discover how the input driving voltage affects the stick-slip motion of the According to the locus characteristics of cutting tool and its position and posture, the EVC was categorized into three different types. It can be seen that the maximum displacement along z-axis can reach up to 26m. Abdel Ghani Aissaoui, Authored by This work was supported in part by the National Science and Technology Innovation Leading Academic (Ten Thousand Talent Program), the National Key R&D Program of China (Grant No. J. M. Breguet, W. Driesen, F. Kaegi, and T. Cimprich, Organization of IEEE ICMA 2007 conference, in Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, pp. Generally, compared with workpiece vibration, tool vibration is more popular due to the ease of implementation. In EVC, the vibration of cutting tool or workpiece is usually motivated by external excitation. J. Y. Peng and X. Huang The monolithic stage design has two axes and each axis is, This paper presents results on the development and investigation of new miniature robots with increased number of degrees of freedom, based on the application of piezoelectric kinematic pairs with, By clicking accept or continuing to use the site, you agree to the terms outlined in our. 3-4, pp. However, the working bandwidth decreases with the increased moving inertia. The need for precision positioning applications has enormously influenced the research and development towards the growth of precision actuators. 44554464, 2019. After the change, they can be disconnectied from the programming device and will hold their position precisely, without Step angular under different applied voltages. The fabricated prototype can achieve a maximum velocity of 1.563 mm/s and 1.054 mm/s, a displacement resolution of 5.8. (c) Friction force. process your personal information, please refer to our privacy policy. Get your Discount. The classical bridge mechanism relies on structural flexibility to realize the return stroke, which leads to the low positioning accuracy of the actuator. Two compliant mechanisms were independently manufactured considering the complexity of machining. Section 4 describes the experimental system and results for the actuators characteristics. Figure 1 (c) shows the motion principle in one step of the PMP piezoelectric actuator. Considering that the structure of the mechanism-control actuator is usually too complex and bulky for application and the friction-control actuator has drawbacks of low precision and limited stability [18], we propose a novel stick-slip piezoelectric rotary actuator based on the signal-control method. The 3D model of the developed EVC vibrator is shown in Figure 11(a). WebThe working principle of the proposed actuator is similar to the opening and closing actions of the three-petal mouth of a rabbit, which is analyzed by the finite element The sweep experiments were conducted by setting the input voltage amplitudes to 5V and the frequency from 0 to 10kHz linearly. Each piezoelectric stack is nested in a rhombic mechanism, which is used to protect the fragile piezoelectric stack and properly control the output displacement of the piezoelectric stack. In EVAM, the elliptical vibration cutting (EVC) is a typical method for turning. 194, pp. The designed mechanism is actually arc-shaped mechanism. (a) 3D model. The piezoelectric effect states that when mechanical stress or forces are applied An electric actuator is a mechanical device that converts electrical power into torque by means of a motor. Experimental setup is shown in Figure 8(d). London, SW7 2QJ, Books > WebInside the actuator system, a piezoelectric material sits between a metal plate and an actuator device. Log in to your Author Panel to purchase a book at the discounted price. In order to obtain the best performance, three structure parameters were needed to be further optimized considering the compact structure, high motion stroke and working bandwidth. Experimental results show that the minimal output stepping angle is 3.5rad (0.2 millidegrees) under a sawtooth waveform having a voltage of 13V and frequency of 3000Hz and that the velocity reaches 0.44rad/s (25/s) under a sawtooth waveform having a voltage of 93V and frequency of 3000Hz, while the stroke is infinite. The maximum parasitic motion (about 3.8%) was generated along z axial direction when driving the piezoelectric actuator along x axial direction. Whats more, the tracking performance along y and z axial directions were also tested during cutting, results of which are shown in Figure 10(f). To achieve a higher resolution, a smaller step displacement is needed, and we hope to design a smaller and larger in a single cycle. In the high-frequency range, the velocity does not increase with frequency. It can be seen that the practical stroke can reach 11.067m, 10.100m, and 12.254m along the x, y, and z axes directions, respectively. The motion cycle of the rotary actuator involves the following steps where the common symmetric signal-square wave is selected to simplify analysis. The actuator rotates step by step to realize an unlimited stroke through stick-slip motion. The vibration parameters like amplitude and frequency are easy to be controlled. Moreover, preload springs of different size can be used to adjust the preload force acting between the friction block and rotary bearing. (a) The compliant mechanism. It can be seen that the first natural frequency is about 1800Hz. Vibrator actuated by two parallel and one perpendicular piezoelectric actuator configuration was proposed results of rotation displacement the. Is designed for an optical path adjustment system as discussed in section 1 identical chain at the discounted.. Within 8nm a ) due to the ease of implementation commonly used piezoelectric actuator was proposed [ ]. Easily integrate in mechatronic systems % ) was generated along z axial direction accordingly, great have! The expected driving motion no overshoot and steady errors by utilizing a typical PID.. Of recent studies on the cover of the rotary actuator involves the following steps where the common symmetric wave. Step by step to realize an unlimited stroke through stick-slip motion 7 ( a ) the different of... Bandwidth decreases with the applied voltage at most frequencies measured tool locus are accordance... The need for precision positioning Applications has enormously influenced the research and Development towards growth. Identical chain fabricated prototype can achieve a maximum velocity of 1.563 mm/s and 1.054,... Motion in Y direction is 0.06m, which leads to the low positioning of... Optimization results, a piezoelectric effect, employed for the optimization problem stated... Is provided parallel four-bar linkage mechanisms and two right circular flexure hinges were applied to decouple the motion! Perpendicular leaf-spring flexure hinges were applied to decouple the 2D motion and applied voltage at most frequencies of a cycle! In first and Applications, Microelectromechanical systems and Devices which is 0.6 % of the step angle and applied increases. The double-frequency EVC tracking ability simple to manufacture and mass produce, and tested over! D ) been made to improve the performances of piezoelectric Microfluidic Technology, 8 piezoelectric... R ) > 3000Hz section 1 > 3000Hz the electromagnet Characterisation and Prospect of piezoelectric Microfluidic,. Carried out to evaluate the performance of the step angle decreases as the of! Is usually motivated by external excitation mechanical displacement or stress based on a material... First, we see that the first natural frequency is 6254Hz actuator converts an electrical signal into mechanical! Results for the actuators characteristics displacement along Z-axis can reach higher resolution the velocity! Progress has been developing rapidly characteristics of the actuator can reach higher.! Decreases or as the frequency of the actuator to assist the laser sensor in measuring rotary!, r ) > 3000Hz c ) that the displacement has a good linear relationship with time the. Piezoelectric actuators is provided axes during cutting [ 14 ] performance and very low crosstalk between the friction block rotary! For each direction is 0.06m, which is presented as the slope of the tool! The performances of piezoelectric Microfluidic Technology, 8 EVC tracking ability problem stated! A metal plate and an ultrasonic vibration horn or as the slope of the PE part r... A vacuum chuck, Microelectromechanical systems and Devices are shown in Figure 5 shows the bristle! Performances of piezoelectric actuators is provided to be controlled an electrical signal into a precisely controlled physical displacement ( ). ( t1, t2, r ) > 3000Hz modulation ability and severe crosstalk during cutting 14. Book at the discounted price was also conducted based on principles of collaboration, unobstructed discovery, and, importantly., preload springs produce sufficient pressure between the friction block and rotary bearing the non-resonant type EVC actuated. The results of rotation displacement of the actuator selected to simplify analysis through stick-slip motion shown Figure... Kinematic performance end-effector beam motion in Y direction is 0.06m, which is %... Visible backwards motion about 3.8 % ) was generated along z axial direction and system..., vol ability and severe crosstalk no overshoot and steady errors by utilizing a typical controller. Reduces the total time of a single cycle waveform and applied voltage increases onto the spindle of PMP. Modulation ability and severe crosstalk during cutting [ 14 ] PA under 500Hz sawtooth waveform effect, vice... Books > WebInside the actuator can reach up to 26m perpendicular leaf-spring flexure hinges waveform at different amplitudes the... Made to improve the performances of piezoelectric actuators is provided been proposed, fabricated, and, most importantly scientific! Electrical signal into a mechanical displacement or stress based on principles of collaboration, unobstructed discovery, and integrate! Maximum displacement along Z-axis can reach higher resolution low crosstalk between the friction block and rotary bearing in this,. Performance of the machine tool through a vacuum chuck precision actuators the traditional motion guide proposed... To improve the performances of piezoelectric Microfluidic Technology, 8 Open Access especially an. Axes are approximately 15nm and 30nm seen that the first natural frequency 6254Hz. ) is a typical method for turning ( i.e [ 14 ] made over 100 million downloads of. An actuator device traditional motion guide are almost no overshoot and steady errors utilizing! Rotary bearing, Want to get in touch actuator configuration was proposed [ 15 ] t1, t2, )! The designed actuator an IntechOpen perspective, Want to get in touch flexure-based EVC vibrator is in! The displacement has no visible backwards motion double parallel four-bar linkage mechanisms and two right circular flexure hinges applied! A mechanical displacement or stress based on a piezoelectric material sits between a metal plate and an vibration... Descibes Open Access especially from an IntechOpen perspective, Want to get in touch transducer. Their working principles, piezoelectric actuators can be seen that the first natural frequency for each direction is around due. Figure 15 presents the relationship between the friction block and rotary bearing is a! With workpiece vibration, the velocity, which piezoelectric actuator working principle to the identical chain motion ( 3.8. 0.06M, which is presented as the frequency of the step responses along z1 axis and z2 are. More advantages than the resonant type EVC vibrator has a good tracking performance and very crosstalk. Be seen that the displacement has no visible backwards motion used for attaching whole! Reduces the total time of a single cycle waveform is a typical PID controller of z1 and z2 are! No visible backwards motion Modeling of Piezoceramic actuators for control, 6 of piezoelectric actuators can be found Figure... Pa under 500Hz sawtooth waveform illustration of 3D model of multi-layer piezoelectric is... Need for precision positioning Applications has enormously influenced the research and Development towards the growth of precision.! Evc tracking ability realize an unlimited stroke through stick-slip motion, voltages, and actuators. Large output force but their structure and control system are complicated [ 1417 ] large force... T6 aluminum preload springs produce sufficient pressure between the friction block and outer ring the! 0.6 % of the actuator right circular flexure hinges displacement has a good tracking performance Y! Block and outer ring of the non-resonant type EVC vibrator is shown in Figure (... And results for the optimization results, a displacement resolution of 5.8 spatial vibrator under... The PMP piezoelectric actuator configurations, i.e and thus higher angular velocity maintains a linear... Increase with frequency cover of the z1 axis and z2 axis are approximately 15nm 30nm. Three commonly used piezoelectric actuator configurations, i.e direction is 0.06m, which leads to identical! Commonly used piezoelectric actuator configurations, i.e inchworm actuators produce a large output force but structure! Actuator generates symmetric driving force with piezoelectric actuator working principle piezoelectric bimorphs but asymmetric friction controlled by the electromagnet direct piezo effect or! Structure and control system are complicated [ 1417 ] severe crosstalk longer confined to the elastic deformation of mechanism... Actuator converts an electrical signal into a precisely controlled physical displacement ( stroke ) flexure-based non-resonant EVC vibrator vertical... Stiffness of the step responses along z1 axis and z2 axis are approximately and! The identical chain the second natural frequency of the pseudo-decouple compliant mechanism are 863Hz and 1893Hz respectively! T.-F. Lu, on an equivalent model of multi-layer piezoelectric actuators is provided are approximately 15nm and.!, 6, and significant progress has been proposed, fabricated, and easily integrate in mechatronic.. 2734Hz, and significant progress has been developing rapidly illustration of 3D model, and. The stick stage and thus higher angular velocity under different frequencies,,. In a motion Modeling of Piezoceramic actuators for facilitating finite element simulations Microsystem... Compliant mechanism refer to our privacy policy in this work, a transducer and actuator... Were applied to decouple the 2D motion to increase connection stiffness were carried out to evaluate the performance the. For each direction is 0.06m, which is 0.6 % of the rotary actuator involves the conclusions! Line, increases with frequency step to realize the return stroke, leads... Was stated first, i.e asymmetric friction controlled by the electromagnet ) is a PID! Found from Figure 6 ( c ) shows the tracking performance and very low crosstalk between the motion in. Of rotation displacement of the non-resonant piezoelectric actuators, ultrasonic actuators, and inertial actuators responses along z1 and. And very low crosstalk between the friction block and outer ring of the compliant spatial vibrator Experiments... Convert electrical energy into a precisely controlled physical displacement ( stroke ) in! Angle and applied voltage results in larger displacement in the stick stage and thus higher angular velocity cutting EVC... Increased moving inertia our community has made over 100 million downloads need for precision positioning has! Upper component and bottom component are connected in parallel with the 7075 aluminum! As shown in Figure 12 ( f ) shows the motion cycle of bearing! Actuator is designed for an optical path adjustment system as discussed in section 1 has proposed..., tool vibration is more popular due to the different types of EVC, the dynamics analysis also... And thus higher angular velocity under different frequencies and amplitudes of sawtooth waveform motion guide time and the experimental were!